Shih-Cheng Hu Chair Professor
- Introduce
- Research Method
- Related Research
- Papers
Dept of Energy and Refrigerating Air-Conditioning
Office : Room 606, Integrated Technology Complex
Phone : +886-2-2771-2171 Ext. 3512
Email : f10870@ntut.edu.tw
Education : PhD, Department of Architectural Engineering, Liverpool University
Expertise : Clean Room Design, Indoor Air Quality Control, Air Conditioning System Design, Semiconductor Optoelectronics and Factory Systems, Fluid Mechanics, Heat Transfer
RCEC Principal Research :
Clean room and high-tech factory facilities technology
RCEC Research Goals :
- Use heat recovery technology, optimization of operating parameters and automatic adjustment of energy-saving modes to improve the energy efficiency of clean room air conditioning systems.
- The preheating energy consumption of the air conditioning system is reduced by more than 10%.
(Can save 13.8% of energy consumption of heating system)
Research on energy saving of the heating system of the outdoor air conditioning box by recycling the waste heat of the electric power machine room
Energy consumption analysis and energy saving research of high-tech factories :
Air Cond. System
Cooling Loads
Process Tool
Chiller System
Fans
Pumps
Operating Condition
Energy Conversion Factor
Data Input
Energy Consumption Cal.
Analysis of energy saving effectiveness
Total solution on micro contamination for wafer AMHS
Wafer transportation system
Wafer box (FOUP) with gas purge diffusers
Laminar Air Curtain (LAC)
Airflow and Particle visualization system for large area application (L-PIV)
Wafer environment monitoring sensor system (wafer sense)
Full-Scale Fiber & Chemical Filter Test Rigs
Fiber Filter Test Rig
Loading Capacity testing system for EPA/ULPA
Full Scale Chemical Filter Test Rig.
Large Scale Particle Image Velocimetry (L-PIV)
Gaussian Laser Beam
L-PIV system
Flow Visualization on FOUP by L-PIV
