Energy-saving technology of advanced semiconductor manufacturing facilities
- Analyze data pertaining to the factory's energy utilization, and involves comparing theoretical calculations with real-world operational data. Any identified areas of potential energy wastage are addressed through the development and execution of improvement plans. The analysis of M Fab in Hsinchu Science Park indicates that the proposed improvement plan is anticipated to reduce the energy consumption of the heating system by 13.8%.
- Patent and Technology Transfer :
- Large area PIV particle velocity measuring instrument
- Laminar Air curtain


Improvement plan of advanced semiconductor manufacturing facilities

