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Energy-saving technology of advanced semiconductor manufacturing facilities

  1. Analyze data pertaining to the factory's energy utilization, and involves comparing theoretical calculations with real-world operational data. Any identified areas of potential energy wastage are addressed through the development and execution of improvement plans. The analysis of M Fab in Hsinchu Science Park indicates that the proposed improvement plan is anticipated to reduce the energy consumption of the heating system by 13.8%.
  2. Patent and Technology Transfer :
    • Large area PIV particle velocity measuring instrument
    • Laminar Air curtain

 

Improvement plan of advanced semiconductor manufacturing facilities
Patent and technology transfer
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